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High-Capacity, Self-Assembled Metal– Oxide– Semiconductor Decoupling Capacitors
High-Capacity, Self-Assembled Metal– Oxide– Semiconductor Decoupling Capacitors
2004
Charles T. Black
Kathryn W. Guarini
Yanpu Zhang
Hyoungjun Kim
James L. Benedict
E. Sikorski
Inna V. Babich
Keith R. Milkove
Keywords:
Oxide
Decoupling capacitor
Semiconductor
Electronic engineering
Metal
Materials science
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