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ポリマー支援ゾル-ゲル法と超臨界乾燥による多結晶SiC基板へのHfO₂多孔質厚膜の形成
ポリマー支援ゾル-ゲル法と超臨界乾燥による多結晶SiC基板へのHfO₂多孔質厚膜の形成
2015
takaya akasi
yousuke katuyama
keiiti rou matusima
Keywords:
Hafnia
Sol-gel
Silicon carbide
Inorganic chemistry
Materials science
Supercritical drying
Chemical engineering
Correction
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