Low-temperature direct bonding of β-Ga2O3 and diamond substrates under atmospheric conditions

Takashi Matsumae,Yuichi Kurashima,Hitoshi Umezawa,Koji Tanaka,Toshimitsu Ito,Hideyuki Watanabe,Hideki Takagi

Low-temperature direct bonding of β-Ga2O3 and diamond substrates under atmospheric conditions

2020

Takashi Matsumae
Yuichi Kurashima
Hitoshi Umezawa
Koji Tanaka
Toshimitsu Ito
Hideyuki Watanabe
Hideki Takagi

Surface-functionalized β-Ga2O3 and diamond substrates were directly bonded by annealing at 250 °C in atmospheric air. Prior to bonding, the β-Ga2O3 and diamond surfaces were OH-terminated by ox...

Keywords:

Physics
Diamond
Direct bonding
atmospheric air
Annealing (metallurgy)
Analytical chemistry

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