X-ray multilayer mirrors for grazing incidence

Material pairs of Re/Al, Re/Mg, Re/B, Pt/B, and Pt/C were selected for grazing incidence multilayer mirrors having a high reflectance for about 1 nm wavelength x ray. The multilayers were fabricated by electron beam deposition and Knudsen cell heating deposition, and were evaluated as to whether or not they had a periodic structure and stability in atmospheric storage. A periodic structure was observed in the transmission electron micrograph for the Pt/C and the Re/B multilayers, although the Re/B multilayer was found to have a decay after a month of fabrication. This decay was caused by the formation of an Re oxide as judged from the x-ray photoelectron spectroscopy analysis.© (1992) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.