Tungsten nanostructured thin films obtained via HFCVD
2011
By using the Hot Filament Chemical Vapor Deposition (HFCVD) technique tungsten thin films were deposited on
amorphous quartz substrates. To achieve this, a tungsten filament was heated at 1300 °C during 30 minutes maintaining
a constant pressure inside the chamber at 460 mTorr and substrate at 700 °C. Transition from tungsten oxide deposits to
tungsten thin films, by varying the substrate temperature, were characterized by means of Scanning Electron Microscope
(SEM), Atomic Force Microscope (AFM), X-Ray Diffraction and, micro-Raman spectroscopy. The SEM micrographs
reveal that the tungsten films have no more than 200 nm in thickness while XRD show evidence of the films crystallize
in the a-tungsten modification. On the other hand, AFM shows that the tungsten thin films exhibit a uniform and smooth
surface composed with semi-spherical shapes whose diameters are below than 50 nm. Furthermore, to the naked eye, the
as-deposited tungsten films exhibit a high mirror-like appearance.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
9
References
1
Citations
NaN
KQI