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Cavity optomechanics with a functionalized silicon nitride membrane
Cavity optomechanics with a functionalized silicon nitride membrane
2016
A. Ortu
A. Bigongiari
F. Fogliano
Andrea Camposeo
Dario Pisignano
E. Arimondo
Francesco Fuso
Donatella Ciampini
Keywords:
Silicon nitride
Optomechanics
Membrane
Molecular physics
Materials science
multilayer membrane
Optoelectronics
silicon nitride membrane
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