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Coarse-Grained Model of RF MEMS Device
Coarse-Grained Model of RF MEMS Device
2014
Alina Alexeenko
Guoheng Chen
Derrick Kearney
Michael McLennan
Venkattraman Ayyaswamy
Gabriela Venturini
Alejandro Strachan
Keywords:
Nanoelectromechanical systems
Nanotechnology
Nanophotonics
Nano-
Nanomedicine
Nanoelectronics
Microelectromechanical systems
Materials science
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