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Electric properties of carbon films deposited by magnetron sputtering with ion assistance
Electric properties of carbon films deposited by magnetron sputtering with ion assistance
2019
M. A. Grushin
E. A. Kralkina
P. A. Neklyudova
A. M. Nikonov
Keywords:
Optoelectronics
Ion
Carbon film
Sputter deposition
Materials science
electric properties
Correction
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