PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

Rainer Hainberger,Paul Muellner,Stefan Nevlacsil,Moritz Eggeling,Alejandro Maese-Novo,Florian Vogelbacher,Martin Sagmeister,Jochen Kraft,Dana Seyringe,Sabine Trupp,Michael Henfling,Svenja Plesshoff,Jan Vaupot,Marcel Sladecek,Elisabet Rank,Wolfgang Drexler

PECVD Silicon Nitride Photonic Integrated Circuits and Key Building Blocks for Sensing Applications

2020

Rainer Hainberger
Paul Muellner
Stefan Nevlacsil
Moritz Eggeling
Alejandro Maese-Novo
Florian Vogelbacher
Martin Sagmeister
Jochen Kraft
Dana Seyringe
Sabine Trupp
Michael Henfling
Svenja Plesshoff
Jan Vaupot
Marcel Sladecek
Elisabet Rank
Wolfgang Drexler

We report the development of CMOS compatible PECVD silicon nitride waveguide based photonic integrated circuits and their application for optical coherence tomography (OCT) and colorimetric gas sensing.

Keywords:

Photonic integrated circuit
Plasma-enhanced chemical vapor deposition
Optoelectronics
Silicon nitride
sensing applications
Materials science

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