Elektrophoretische Herstellung keramischer Mikrostrukturen

Ceramics with microstructured surfaces or three-dimensional microstructures open up new possibilities in applied microsystem and microchemical engineering technology [1-3].The use of submicron and nano-sized ceramics is essential for small structural details requiring excellent surface roughness. Processing such powders poses a special challenge, starting from the selection of a suitable shaping process. One procedure that meets these requirements is the electrophoretic deposition (EPD) of ceramic particles [4-7]. The principle of EPD is based on the fact that charged particles from a dispersed and electrostatically or electrosterically stabilized suspension are deposited onto an oppositely charged electrode, representing the microstructured substrate. Thermal removal of the lost substrate and sintering of the green body results in ceramic microstructures and/or microstructured surfaces with high density, low surface roughness and high dimensional accuracy [8].