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Controllable generation of large-scale highly regular gratings on Si films
Controllable generation of large-scale highly regular gratings on Si films
2021
Jiao Geng
Xiaoguo Fang
Lei Zhang
Guangnan Yao
Liye Xu
Fengjiang Liu
Tang WeiWei
Liping Shi
Min Qiu
Keywords:
Engineering physics
scale
Materials science
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