Application of tunable diode lasers in control of high-pure-material technologies

Diode laser spectrometer for trace molecules' analysis in high-pure volatile substances has been developed. Spectrometer is equipped with heated evacuated system for gas input and gas mixtures' preparation. Analytical parameters were estimated for water traces determination in oxygen, argon, and monogermane. Detection limit was equal to 8 ppb, 4 ppb, and 4 ppb respectively for these gas-matrixes with 1.5 m optical path length.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.