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Gas-abrasive wear resistance of silicon and boron carbonitride films
Gas-abrasive wear resistance of silicon and boron carbonitride films
2017
V. R. Shayapov
V. S. Sulyaeva
Yu. M. Rumyantsev
M. N. Khomyakov
M. L. Kosinova
Keywords:
Abrasive
Metallurgy
Boron carbonitride
Materials science
Silicon
wear resistance
Spectrophotometry
Chemical vapor deposition
Surface finish
Correction
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