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Kinetic Study on the Wet Etching of La2O3 in Acidic Solutions
Kinetic Study on the Wet Etching of La2O3 in Acidic Solutions
2011
Jisook Oh
Jin Sung Bae
Sangwoo Lim
Keywords:
Etching (microfabrication)
Inorganic chemistry
Chemistry
Kinetic energy
Correction
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