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(Invited) Epitaxial Growth of Si:C Alloys: Process Development and Challenges
(Invited) Epitaxial Growth of Si:C Alloys: Process Development and Challenges
2010
Abhishek Dube
Ashima B. Chakravarti
R. Takalkar
Junjun Li
F Yang
Anita Madan
Zhengmao Zhu
Rainer Loesing
R. Murphy
T. Adam
L. Black
Judson R. Holt
Eric C. Harley
Matthew W. Stoker
Dominic J. Schepis
Xiaolin Chen
Keywords:
Epitaxy
Metallurgy
Materials science
Engineering physics
process development
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