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Photoenhanced effects in chemical vapor deposition and properties of ferroelectric PbZr[x]Ti[1-x]O[3] thin films
Photoenhanced effects in chemical vapor deposition and properties of ferroelectric PbZr[x]Ti[1-x]O[3] thin films
1994
takuma katayama
Keywords:
Chemical vapor deposition
Thin film
Ferroelectricity
Inorganic chemistry
Materials science
Chemical engineering
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