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Time-Domain Spectroscopy of Solid by using EUV Laser
Time-Domain Spectroscopy of Solid by using EUV Laser
2008
Nobuhiko Sarukura
Yusuke Furukawa
Hidetoshi Murakami
Shigeki Saito
H. Nishimura
Kunioki Mima
M. Tanaka
Masaharu Nishikino
Hiroshi Yamatani
Keisuke Nagashima
Toyoaki Kimura
Yuji Kagamitani
Tsuguo Fukuda
Keywords:
Spectroscopy
Optics
Laser
Time domain
Physics
Extreme ultraviolet lithography
Optoelectronics
Correction
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