Design and fabrication of composite vibrating plate used for piezoelectric inkjet printing head

Piezoelectric vibrating plate is an important component of the piezoelectric inkjet print head, and it determines the ejection performance of the piezoelectric inkjet print head. Based on the design model of the vibrating plate and the lead zirconate titanate piezoelectric film (PZT) in the inkjet print head, the approximate expression of the equivalent load and deflection of the vibrating plate were established. The Cu/SiO2 vibration plate structure of the piezoelectric inkjet print head was fabricated based on MEMS process. The laser Doppler test was performed on the vibrating plate to obtain the amplitude of the Cu/SiO2 vibrating plate. The test results are in good agreement with the theoretical predictions based on the mechanical analysis.