Semiconductor device metallization systems and procedures
2014
Semiconductor device metallization systems and methods are disclosed. In some embodiments, a metallization system for semiconductor devices on a main unit and a plurality of arranged close to the main unit modules. One of the plurality of modules includes a physical vapor deposition (PVD) module and one of the plurality of modules includes an ultraviolet light (UV) Aushartemodul.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI