Deep Silicon Amorphization Induced by Femtosecond Laser Pulses up to the Mid-Infrared

This work was partly funded by Laserlab-Europe (Grant Agreement No. 284464, EU’s Seventh Framework Programme), Project No. CNRS-LP3002581. J.S. acknowledges financial support through the national research grant UDiSON (TEC2017-82464-R) from the Spanish Research Agency (AEI, Ministry of Research and Innovation) and the European Regional Development Fund (ERDF), as well as the Consejo Superior de Investigaciones Cientificas for the intramurales project (201850E057). N.C. acknowledges a predoctoral fellowship from the MICINN assigned to project UDiSON. D.G. acknowledges financial support from the European Research Council (ERC), H2020 program (Grant Agreement No. 724480).