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Comparison of Dry Development Techniques using $\bf O_{2}$ and $\bf SO_{2}/O_{2}$ Low-Pressure Plasmas
Comparison of Dry Development Techniques using $\bf O_{2}$ and $\bf SO_{2}/O_{2}$ Low-Pressure Plasmas
1994
Michel Pons
Olivier Joubert
Christine Martinet
J. Pelletier
Jean-Pierre Panabiere
Andre P. Weill
Keywords:
Analytical chemistry
Plasma
Physics
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