Modeling and Simulation of an Atomic Force Microscopy System in the Z Direction

Atomic Force Microscopy (AFM) is a powerful tool in nanoscale imaging and manipulation. Many efforts have been made to improve its scanning rate by implementing many advanced controllers. The design of the controllers requires the achievement of the model of the AFM system, especially in the Z direction. The paper proposes a simple system identification method to estimate the model of the AFM in the Z direction by utilizing the experimental data. The simulation system is established to obtain the performance of controllers. Experiments demonstrate the simulation system is effective and helpful for the successful design and implementation of the controllers in the actual AFM system.