Development of Roll-to-Roll Multi-layer Thermal Evaporation System for Flexible OLED Devices

This paper presents the development of roll-to-roll thermal evaporation equipment for flexible OLED devices. Under high vacuum conditions, the continuous movement of the flexible film was precisely controlled by the developed roll-to-roll method. And, it has been shown that flexible OLED samples can be fabricated by continuously and sequentially depositing organic/inorganic multi layers.