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Beam quality control of DUV laser beam using random phase plate
Beam quality control of DUV laser beam using random phase plate
2019
Yohei Tanaka
Chen Qu
Yuki Tamaru
Hironori Igarashi
Atsushi Fuchimukai
Taisuke Miura
Junichi Fujimoto
Hakaru Mizoguchi
Keywords:
Beam (structure)
Optics
Laser beam quality
Materials science
Laser
laser beams
phase plate
Correction
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