Secondary ion emissions from fluorolubricants under several primary beam conditions by TOF-SIMS

Abstract Using fluorolubricants on 8 mm video tape and a hard disk, a basic aspect of secondary ion emission was investigated by TOF-SIMS under several primary beam conditions and film thicknesses. The results are discussed from the point of view of reproducibility of the intensity ratio. It was found that the influence of primary beam energy, angle and species is negligible when compared with other artifacts such as the conditions of charge compensation and the spectrometer transmission, etc. For more than 2 nm film thickness, the 1–6% relative standard deviation was found to be comparable with those of primary beam energy, angle and species.