Wafer and wafer carrier assembly for wafer exchange means exchange device

2011 
The invention discloses a wafer bracket assembly applied to wafer switching equipment and the wafer switching equipment with the wafer bracket assembly. The wafer bracket assembly applied to the water switching equipment comprises a bracket, wherein the upper surface of the bracket is provided with a placement surface for placing a wafer; the placement surface is higher than the rest of the upper surface of the bracket; and the inner edge of the placement surface has a preset distance with the center of the bracket, and the outer edge of the placement surface is matched with the outer diameter of the wafer. The wafer bracket assembly provided by the embodiment of the invention does not pollute the wafer when the wafer is replaced.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []