Glue-free bimorph mirror for vacuum chamber use

PZT-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they haven’t been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore we have developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. However at long type, precise shape control had been hard since its mirror size was longer than PZT plate length whose gap between each PZT enevitablly existed. These gap area cannot be bended. In this study, we developed deformable mirror using triangle shaped PZT which aim is to reduce gap effect even at long mirror. At the simulation result, the gap effect would be reduced to be under 0.01 nm even at maximum bending. Also, vacuum tests of PZT glue-free bimolph mirror were also conducted. The final degree of vacuum obtained 9×10-8 Pa that was same as background level.