Interference rotation mapping detection method with transverse resolution of 1nm

The invention discloses an interference rotation mapping detection method with transverse resolution of 1nm. The method is characterized in that a double-arm interference microscope system is designed. The system can present a reference reflecting surface and the image of an object to be detected at a unified position so as to avoid interference. Spectrum or stripes formed by interference can reflect the optical path difference of a point to be detected. A rotating/scanning platform under piezoelectric driving is mounted under the object to be detected, and transverse scanning with accuracy of 1nm and 360-degree rotating can be achieved. Through a differential collection method, an optical length projection with ultrahigh resolution in the one-dimensional direction can be obtained. Therefore, a three-dimensional image with ultrahigh resolution can be reconstructed by rotating the sample and collecting the optical length projections of the sample at multiple angles.