On-axis sputter deposition of Sr/sub 2/AlTaO/sub 6/ dielectric thin films for multilayer Y-Ba-Cu-O circuits

Sr/sub 2/AITaO/sub 6/(SAT) is a desirable dielectric for use in YBCO multilayer circuits due to the close lattice match to YBa/sub 2/Cu/sub 3/O/sub 7/(YBCO), and low dielectric constant, SAT thin films have been deposited using on axis rf magnetron sputtering. Epitaxial growth of SAT has been measured using x-ray diffraction. The electrical isolation of SAT sandwiched between two YBCO layers, and the superconducting critical current of YBCO deposited over SAT crossover structures are measured.