Coherent Optical Testing Of Quality And Geometric Shape Of Mirror Reflective Surfaces

The fast noncontact testing of quality of the 11-12th metal working surface plays an important part in the mechanical engineering, and especially in the bearing industry. At present, the optical testing devices used in industry are based on the intensity measurement of white light reflected from the surface. Such devices have a simple optical scheme, which permits one to detect a wide class of surface defects. However, using of incoherent light does not allow one to detect defects with the size less than 20-30 microns. This can not satisfy the present-day technical requirements. It should also be noted that devices of this type are not sensitive to geometric-shape defects of the object surface.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.