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A detailed study on the growth of CaS thin films by atomic layer epitaxy
A detailed study on the growth of CaS thin films by atomic layer epitaxy
1993
J. Rautanen
Markku Leskelä
Lauri Niinistö
E. Nykänen
Pekka Soininen
Keywords:
Atomic layer epitaxy
Calcium sulfide
Chemical engineering
Thin film
Growth rate
Materials science
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