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Plasma surface process of cubic boron nitride studied by using microscopic single crystals
Plasma surface process of cubic boron nitride studied by using microscopic single crystals
2017
Tamura Takahiro
Takami Takuya
Yanase Takashi
Nagahama Taro
Shimada Toshihiro
Keywords:
Chemical substance
Nanotechnology
Crystal
Plasma
Boron nitride
Engineering
Molecular physics
plasma surface
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