Some cerium .beta.-diketonate derivatives as MOCVD precursors

Four [beta]-diketonato complexes of cerium were synthesized and investigated by thermal analysis, mass spectrometry, and infrared spectroscopy with respect to their ability to function as possible precursors for MOCVD. Thermal analysis revealed sufficient volatility for all these compounds and an enhancement of the volatility by using flourinated ligands could be observed. Using all these precursors, growth experiments of cerium dioxide films were carried out in a horizontal MOCVD reactor. The growth rates were determined by ellipsometry and independently by profilometry. The dependence of the growth rate on evaporation rate, oxygen flow and substrate temperature are discussed in detail. Single-phase CeO[sub 2] films with high preferential orientation in the [100] and [111] directions could be prepared on Si[100] and quartz as was shown by X-ray diffraction. 32 refs., 7 figs., 7 tabs.