A sensor for blood cell counter using MEMS technology

Abstract In this study, a sensor for blood cell counter has been developed using MEMS technology. The number of blood cells in human blood could be counted with this micro silicon MEMS device. Aperture-impedance method was used to detect blood cells as voltage signals. As a result of the investigations, suitable materials for the electrode of the device have been found. At first, polystyrene latex particles (PSL: Duke Scientific Corp.) were used to confirm the operation of the blood cell counter instead of the actual blood. The difference of the sizes of PSL particles were successfully recognized from the height of pulses and also the concentration of PSL particles were counted by the number of pulses. Finally control blood was introduced into the device, and both red and white blood cells were detected.