Highly precise micro torsion angle detection by fringe array

Fringe array is proposed as the cooperated target in the precise torsion angle detection. The target fringe array image is generated according to the structure of the optical system, and the torsion angle detection algorithm is analyzed in response to the gray distribution of the image. The factors affecting the detection precision of the fringe torsion angle are analyzed theoretically and numerically. It indicates that the detection precision of the torsion angle is 1 angular second or even less, carefully selecting the detector array. Significantly, experiments are performed to demonstrate the precision and the results match well with the simulations.