Beam-Induced Damage to Thin Specimens in an Intense Electron Probe
2006
We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.
Keywords:
- Analytical chemistry
- Scanning electron microscope
- Scanning transmission electron microscopy
- Conventional transmission electron microscope
- Environmental scanning electron microscope
- Transmission electron microscopy
- Electron beam-induced deposition
- Materials science
- Reflection high-energy electron diffraction
- Electron microscope
- Energy filtered transmission electron microscopy
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