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Fabrication of InGaAs quantum dots by metal organic chemical vapor deposition and selective area epitaxy
Fabrication of InGaAs quantum dots by metal organic chemical vapor deposition and selective area epitaxy
2004
V. C. Elarde
R. B. Swint
Terence Yeoh
J. J. Coleman
Keywords:
Selective area epitaxy
Chemical vapor deposition
Physical therapy
Electron-beam lithography
Analytical chemistry
Quantum dot
Metal
Medicine
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