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Use of soluble in alkaline milieu silsesquioxanpolymeren in a resist for the production of electro African share.
Use of soluble in alkaline milieu silsesquioxanpolymeren in a resist for the production of electro African share.
1986
Hisashi Sugiyama
Kazuo Nate
Takashi Inoue
Akiko Mizushima
Keywords:
Organic chemistry
Resist
Materials science
Chemical engineering
Chemistry
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