A High Temperature Solid Pressure Sensor Based on Fiber Bragg Grating

For the requirement of pressure detection in high temperature environments, this paper presents a fiber Bragg grating (FBG) based pressure sensor with a simple structure. The structural model of the sensor has been established with the consideration of a sensing principle and a small deflection effect of the circular membrane. The finite element analysis has been employed to validate the rationality of the sensor structure design and realize the digital simulation of the theoretical model. Through the analysis, the selection of packaging materials, the design of structural parameters and the pressure and temperature calibration of the developed sensor has been performed. The encapsulation of the sensor at high temperatures has been improved based on the theoretical analysis, simulation and testing, which proves the effectiveness of the sensor for pressure measurement at high temperatures of 100 °C~250 °C. The study provides a feasible sensing device for high-temperature pressure detection.