Shutter blade of photo-etching machine
2013
The invention provides a shutter blade of a photo-etching machine. The shutter blade is applied to an exposure system of the photo-etching machine. The base material of the shutter blade is a metal material. The shutter blade comprises a front surface and a back surface back to the front surface which are irradiated by mercury lamp light, wherein at least one of the front surface and the back surface of the shutter blade is coated by a nonmetal coating. According to the shutter blade, at least one of the front surface and the back surface of the shutter blade is coated by the coating, so that the temperature of the shutter blade can be controlled; the visible light irradiated by the heated shutter is detected by a detector in a dosage control system, so that the interference on the dosage control of the heat irradiation is avoided; and the influence on the dosage control accuracy caused by the heated irradiation of the shutter blade is avoided.
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