Design and regularity research of MOCVD heating plate based on experiments and simulations

Abstract Metal organic chemical vapor deposition (MOCVD) is the key technique used in developing thin film materials, such as GaAs, InP, and ZnO. The heating system design plays an important role in the overall design of the complete MOCVD system. In this study, the structure of the MB-600D MOCVD resistance heater developed by us was considered as the research object. The distribution of current and temperature in the heating plate can be determined through thermoelectric simulation. Supported by the theory of thermodynamics and thermoelectricity, it can be used for the improved design and regularity research of the heating plate. On this basis, it was found that higher surface emissivity of the heater correlated to greater thermal radiation, stronger heating effect of the graphite disc, and higher overall temperature. A direct correlation was observed between the rotational speed of the graphite disc and the upper surface temperature distribution uniformity; the optimal vertical distance between the graphite disc and heater was also determined. These results provide a theoretical basis to improve the MOCVD heating plates and a solution for high-quality epitaxial growth.