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Deposition mechanism of trace metals on silicon wafer surfaces in ultra pure water
Deposition mechanism of trace metals on silicon wafer surfaces in ultra pure water
2000
Takayuki Homma
Jun Tsukano
Tetsuya Osaka
Masaharu Watanabe
Kiyoshi Nagai
Keywords:
Wafer
Materials science
Metallurgy
Deposition (law)
Correction
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