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Challenges in nanometrology: highprecision measurement of position and size
Challenges in nanometrology: highprecision measurement of position and size
2015
Harald Bosse
Bernd Bodermann
Gaoliang Dai
Jens Flügge
C. G. Frase
Hermann Groß
Wolfgang Häßler-Grohne
Paul Köchert
Rainer Köning
Frank Scholze
Christoph Weichert
Keywords:
Engineering
Electronic engineering
Measurement uncertainty
Nanometrology
Photomask
signal modeling
Traceability
Interferometry
Correction
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