A novel alternating-pump technique for picosecond ultrasonic study of Mo/Si multilayers
1999
Summary form only given. Mo/Si multilayer mirror coatings are a key enabling technology for extreme ultraviolet lithography. The authors show that picosecond ultrasonics has proven to be a useful technique for the study of thin films and multilayers and can be used as a nondestructive characterization tool for these nanostructures.
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