Low-power/high-temperature sensors and MEMS in SOI technology

Low-power and high-temperature sensors and MEMS designs based on bulk, SOI and IC compatible materials and processes are presented here. Target markets are in general public sensors for UV, ozone, CO, liquids presence, e.g. in mobile devices. Or in health, sensors for the medical diagnosis (DNA, RNA, bacteria, viruses). Simple, low cost and low consumption devices are required in medical applications. In our laboratory aluminum oxide interdigitated capacitors have been developed and successfully tested on DNA hybridization test on HIV and cancer (TP-53), as well as on bacteria and humidity or condensation (integrated into a wireless breathing monitoring system), all of them showing comparable results to the state of the art using existing standard biological protocols procedures that open new opportunities for Medical Applications. For UV light based detections (UV Diode), that are ready for use, packaging must be customized. Customers are the kits fabricator to integrate our device for a fast electrical measurement (for DNA concentration, turbidity or fire detection). Our technology demonstrates high-performance CMOS integrated circuits; easy integration of special devices, sensors and MEMS; operation in harsh conditions (micro power, high-temperature, remote RF link, etc.); very low power consumption, miniaturized, wireless or high-temperature sensors for process control, monitoring and data acquisition. Furthermore, our devices deliver excellent performance compared to the state of the art. It is important to note that this article resumes some of our results from previous papers (see the references). More information can be found in the university website (www.dice.ucl.ac.be) or in www.sensoi.net. in a more commercial way.