[Opto-Electron Eng, 2017, 44(12)] Review of UV laser and its applications in micromachining

Ultraviolet(UV) laser has unique advantages in micromachining due to short wavelength, high machining accuracy and cold processing property, leading to improve manufacturing quality effectively. In recent years, electronic industry has been developed rapidly and needs high fabrication requirements. Progress of UV laser has attracted much attention in applications of electronic industry because it can produce complex structures on almost any materials with flexible process and small heat-affected zone. In this review, we summarize the history of UV laser development and fundamental principles as well as characteristics of excimer laser and diode pumped solid state laser, which are two major UV lasers used for micromachining. Moreover, we analyze the development and applications of UV laser in micromachining of semiconductor, optical element and polymer. Finally, we propose some prospects for further research and development in UV laser and its applications.