Application of AQUA and QUAX to matrix corrections in AES and XPS

The rapid determination of surface composition from raw spectral data using interative procedures contained in the computer programs AQUA and QUAX is described. The establishment of this system of programs has required the compilation of library files of basic elemental data to enable the automatic execution of matrix calculations. This system has been designed so that the effect of different methods of calculation of attentuation length or backscatter factor on calculated matrix factor and final surface composition can be readily investigated. These calculations would be tedious without the use of the AQUA and QUAX computer surface analysis system. In this investigation matrix factors and surface compositions have been calculated for a number of materials, including NiFe and CuAg alloys. Application of the option in the QUAX program for standardless surface analysis by XPS has been investigated in GaNx(Oy) films.