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Vinylsulfonic acid ester derivatives, polymer compounds and photoresist compositions
Vinylsulfonic acid ester derivatives, polymer compounds and photoresist compositions
2012
nakayama osamu
osamu nakayama
yosinori tani
takasi fukumoto
mei ten takeda
Keywords:
Polymer
Inorganic chemistry
Vinylsulfonic acid
Photoresist
Chemistry
Organic chemistry
Polymer chemistry
ester derivatives
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