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Dummy Gate Footing Problems in Scaling Down of FinFET Structures
Dummy Gate Footing Problems in Scaling Down of FinFET Structures
2020
Changcheng Jiang
Xingyu Xiao
Xing Ke
Yanliang Wang
Yuchen Li
Zhuofan Chen
Yan Wang
Hai-yang Zhang
Keywords:
Scaling
Topology
Physics
Correction
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