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Direct-write ALD of In2O3:H and ZnO at the micro- and nanoscale
Direct-write ALD of In2O3:H and ZnO at the micro- and nanoscale
2017
A. Mameli
Bora Karasulu
B. Barcones
Verheijen
Adriaan J. M. Mackus
Wilhelmus M. M. Kessels
F. Roozeboom
Keywords:
Nanotechnology
Atomic layer deposition
Nanoscopic scale
Material physics
Materials science
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